No abstract

Extreme miniaturization of infrared spectrometers is critical for their integration into next-generation consumer electronics, wearables and ultrasmall satellites. In the infrared, there is a necessary compromise between high spectral bandwidth and high spectral resolution when miniaturizing dispersive elements, narrow band-pass filters and reconstructive spectrometers. Fourier-transform spectrometers are known for their large bandwidth and high spectral resolution in the infrared; however, they have not been fully miniaturized. Waveguide-based Fourier-transform spectrometers offer a low device footprint, but rely on an external imaging sensor such as bulky and expensive InGaAs cameras. Here we demonstrate a proof-of-concept miniaturized Fourier-transform waveguide spectrometer that incorporates a subwavelength and complementary-metal–oxide–semiconductor-compatible colloidal quantum dot photodetector as a light sensor. The resulting spectrometer exhibits a large spectral bandwidth and moderate spectral resolution of 50 cm−1 at a total active spectrometer volume below 100 μm × 100 μm × 100 μm. This ultracompact spectrometer design allows the integration of optical/analytical measurement instruments into consumer electronics and space devices.

This article presents an innovative high spectral resolution waveguide spectrometer, from the concept to the prototype demonstration and the test results. The main goal is to build the smallest possible Fourier transform spectrometer (FTS) with state of the art technology. This waveguide FTS takes advantage of a customized pattern of nano-samplers fabricated on the surface of a planar waveguide that allows the increase of the measurement points necessary for increasing the spectral bandwidth of the FTS in a fully static way. The use of a planar waveguide on the other hand allows enhancing the throughput in a waveguide spectrometer compared to the conventional devices made of single-mode waveguides. A prototype is made in silicon oxynitride/silicon dioxide technology and characterized in the visible range. This waveguide spectrometer shows a nominal bandwidth of 256~nm at a central wavelength of 633~nm thanks to a custom pattern of nanodisks providing a μm sampling interval. The implementation of this innovative waveguide FTS for a real-case scenario is explored and further development of such device for the imaging FTS application is discussed.