In this paper we present a sub-bandgap photodetector consisting of a metal grating on a thin metal patch on silicon, which makes use of the enhancement produced by the excitation of surface plasmon polaritons at the metal-silicon interface. The grating is defined via e-beam lithography and Au lift-off on a Au patch defined beforehand by optical lithography on doped p-type silicon. The surface plasmon polaritons are absorbed by the metal, leading to the creation of hot holes that can cross into the silicon where they are collected as the photocurrent. Physical characterization of intermediate structure is provided along with responsivity measurements at telecom wavelengths. Results are promising in terms of responsivity, with a value of 13 mA/W measured at 1550 nm - this is among the highest values reported to date for sub-bandgap detectors based on internal photoemission. The Schottky photodetector can be used in, e.g., non-contact wafer probing or in short-reach optical communications applications.
Nanoantennas are key optical components for several applications including photodetection and biosensing. Here we present an array of metal nano-dipoles supporting surface plasmon polaritons (SPPs) integrated into a silicon-based Schottky-contact photodetector. Incident photons coupled to the array excite SPPs on the Au nanowires of the antennas which decay by creating "hot" carriers in the metal. The hot carriers may then be injected over the potential barrier at the Au-Si interface resulting in a photocurrent. High responsivities of 100 mA/W and practical minimum detectable powers of -12 dBm should be achievable in the infra-red (1310 nm). The device was then investigated for use as a biosensor by computing its bulk and surface sensitivities. Sensitivities of ∼ 250 nm/RIU (bulk) and ∼ 8 nm/nm (surface) in water are predicted. We identify the mode propagating and resonating along the nanowires of the antennas, we apply a transmission line model to describe the performance of the antennas, and we extract two useful formulas to predict their bulk and surface sensitivities. We prove that the sensitivities of dipoles are much greater than those of similar monopoles and we show that this difference comes from the gap in dipole antennas where electric fields are strongly enhanced.
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