LO phonon-overdamped plasmon coupled modes in n-type epitaxial films of β-SiC have been measured in the carrier concentration range from 6.9×1016 to 2×1018 cm−3. The carrier concentrations and damping constants are determined by line-shape fitting of the coupled modes and compared with the values derived from Hall measurements. The concentrations obtained from the two methods agree fairly well. The Faust–Henry coefficient determined from the fitting is 0.35. The line-shape analysis of the coupled mode has shown that the dominant scattering mechanisms in β-SiC are deformation-potential and electro-optic mechanisms.
The molecular beam epitaxial growth of Si-doped GaAs on slightly (1–5°) misoriented (111)A substrates was examined. Occupation sites of Si were greatly affected by the tilted angle, the flux ratio and the substrate temperature. In the growth on an exactly (111)A-oriented substrate at low flux ratio, substantially all Si atoms acted as acceptors. With increase of the tilted angle and/or the flux ratio and with decrease of the substrate temperature, the number of donor site Si atoms increased. A doping mechanism including preferential decomposition of As4 molecules at the steps was proposed.
The production technologies of the flat panel display in the size liquid crystal TVs have been developed remarkably. The importance of evaluation method of the display has been also increased. Using the new indexes for evaluations of the motion picture quality and the viewing angle characteristic of the liquid crystal TVs, we review the developments of the recent liquid crystal television technology.
3C-SiC p-n junction diodes are prepared on Si substrates by chemical vapor deposition growth with appropriate impurity doping, and their current-voltage (I-V) and capacitance-voltage (C-V) characteristics are studied. I-V curves show good rectifying characteristics with a value of 3.3 for the ideal factor n and a reverse leakage current less than 10 μA at −5 V. The junction area is approximately 0.8 mm2. The built-in voltage is around 1.4 V by C-V measurements.
Temperature dependencies of Hall mobility of nondoped and nitrogen-doped n-type β-SiC films have been analyzed using a conventional theoretical model. Considering acoustic, polar optical, and piezoelectric lattice scatterings, as well as ionized and neutral impurity scatterings, theoretical calculations well fitted to the experimental results are obtained at 70–1000 K. Contributions of acoustic, polar optical, and piezoelectric scatterings to the whole lattice scattering are 84%, 14%, and 2% at 300 K, respectively. Impurity compensation ratio NA/ND of nondoped films increases from 0.45 to 0.96 with increasing Si/C ratio in the source gases. Nitrogen-doped films show constant compensation ratios of 0.25–0.30 with various doping amounts. These values are different from the previous results obtained by the analysis of temperature dependencies of carrier concentration.
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