A metal atomizing sheet with a group of micro-tapered holes is the core constituent of a piezoelectric atomizer. However, the diameters of large-end and small-end micro-tapered holes in industrial applications deviate from the design values by 15.25% and 15.83%, respectively, which adversely impacts the effect of atomizers. In this study, two main factors that influence the machining quality of tapered holes, the external vibration disturbance and the internal system errors inside the laser processor, were explored; consequently, the vibration model of the machining device and the laser drilling model were established, respectively. Based on the models and the experimental results, it was found that the errors in diameter caused by these two factors accounted for 20% and 67.87% of the total deviation, respectively. Finally, an improved method was proposed, where a damping system was added to the machining device, and the diameter of the initial laser spot was corrected. The measurement results of tapered holes machined by the improved method showed that the deviation of the large diameters and the small diameters from the design values declined to 4.85% and 4.83%, respectively. This study lays a foundation for the high-precision and large-scale industry of atomizing sheets, and provides a new research direction for enhancing the performance of atomizers.

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