A simplified method for planarizing liquid-crystal-on-silicon (LCOS) backplanes is presented. The method relies on the planarizing capability of spin-cast benzocyclobutene (BCB) polymeric resin. BCB planarization shows a sixfold reduction in step height on the surface of a typical LCOS backplane. Contact with the underlying pixel circuitry is made by dry etching through openings in the BCB layer. Reflective metal (87% reflectivity) is deposited over the planarized surface and patterned to form high-aperture-ratio pixel mirrors (84%). An average resistance of 0.75 Omega per via was achieved with 3.6-microm-diameter vias in 2-microm-thick BCB. The method and the results of this LCOS backplane planarization and postprocessing are described.
-We describe fundamental aspects of the two major digital cinema projector platforms with special regard to the needs of 3D cinema. We present several optical solutions for 3D digital cinema, including polarization-converting modulators, over-under lenses, and dual projector systems. Finally, we define a metric for 3D efficiency and compare several solutions on this basis.
Abstract— We are constructing a head‐up display for an automotive application based on a liquid‐crystal‐on‐silicon microdisplay. We shall describe the application driving the device development, the display device, and the technology enhancements implemented for this application.
The final word on 3D-cinema entertainment value cannot be written until patrons experience stereo-images of uncompromised quality. There has always been a performance cost associated with the addition of 3D, and as technology enables better 2D images, there is a threat that this situation will persist. We will examine the technical challenges of achieving the holy-grail for 3D; a compromise-free stereoscopic 3D presentation, in the face of new proposed 2D standards.
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