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Integrated inertial surface-micromachined MEMS technology is presented as an example of how accelerometers and angular-rate sensors are evolving in response to competition, innovation and customer requirements. These market forces are commoditizing the products and impacting key technologies such as fabrication, assembly, packaging, test, and design. Current and future directions of integrated inertial MEMS technology will be disclosed, as well as how these advances will enable both future inertial and non-inertial MEMS products.

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