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Abstract. Samples of pure phase CuAlO 2 and transition metal element Fe doped were synthesized by solid phase sintered method. The phase structure, optical properties and miscellaneous phase formation mechanism were characterized by X-ray diffraction (XRD) and Infrared Spectroscopy (IR) respectively. The results of XRD show that the product was really pure p-type transparent conductive oxide CuAlO 2 . Samples containing a small amount of CuO mixed phase may be caused by block reaction environment. IR spectroscopy results show that the transmittance of the sample was declined with the increasing of the iron-doped concentration. Doped samples have more than one absorption peak is the result of mixed substitution.

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