Amorphous- and nanocrystalline-silicon thin-film photovoltaic modules are made in high-throughput manufacturing lines that necessitate quickly cleaning the reactor. Using NF₃, a potent greenhouse gas, as the cleaning agent triggered concerns as recent reports reveal that the atmospheric concentrations of this gas have increased significantly. We quantified the life-cycle emissions of NF₃ in photovoltaic (PV) manufacturing, on the basis of actual measurements at the facilities of a major producer of NF₃ and of a manufacturer of PV end-use equipment. From these, we defined the best practices and technologies that are the most likely to keep worldwide atmospheric concentrations of NF₃ at very low radiative forcing levels. For the average U.S. insolation and electricity-grid conditions, the greenhouse gas (GHG) emissions from manufacturing and using NF₃ in current PV a-Si and tandem a-Si/nc-Si facilities add 2 and 7 g CO₂(eq)/kWh, which can be displaced within the first 1-4 months of the PV system life.
Abstract-The objective of this work is to understand the the 1980's grew to include tungsten, titanium, copper and materials and energy requirements, and emissions associated tantalum in the 1990's. In the past few years, however, dozens with new semiconductor manufacturing technology nodes.of new elements as well as a broad array of highly tailored Current and near-future CMOS technologies (for the 45-nm and compounds have been integrated into the process flow or are 32-nm nodes) are investigated using an inventory based on being considered as tools to overcome the challenges of current bottom-up process data. The process flow of the CMOS chip is leakage and tunneling, or to build novel geometrical modeled by updating an existing inventory analysis (for 130 nm arrangements, in order to achieve ever smaller devices.node devices) to include strained Si channels, metal gates, 10 layers of interconnect and high-k gate dielectrics used in 45-nm and 32-nm CMOS nodes. Conclusions are made concerning emissions of new materials and trends in life cycle energy consumption of logic devices.
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