Pulsed plasmas have emerged as promising candidates as a means for precise control of ion energy/angle dependent surface processes and surface chemistry during the plasma process, which are key to 3 nm and beyond device fabrication. The ion energy distribution functions (IEDFs) and ion fluxes over a pulsed period are important to understand as they directly influence the feature profile, damage, and selectivity. We have developed an advanced plasma diagnostics (APD) system with advanced pulsing capability, including source, bias, and synchronous pulsing. It is a compact inductively coupled plasma system with a RF source frequency of 13.56 MHz intended to diagnose the general behavior of biased high density plasmas. We report the effect of the pulse frequency (2–10 kHz), RF duty cycle (25%–75%), DC duty cycle (5%–50%), phase lag (50–60 μs), RF power (120–180 W), DC bias voltage (0–150 V), and discharge pressure (20–80 mTorr) on the IEDFs and ion flux over a pulse period on the APD system. The time-resolved IEDFs and ion flux were measured using a retarding field energy analyzer. The ion energy transitions in a pulsed period from a plasma ignition stage to a stable stage and from plasma in a glow period to an afterglow period are studied. The results indicate that the ion energy and ion flux are tailored by RF pulsing and RF-DC pulsing. The time-resolved IEDF demonstrates the merits of pulsing to precisely control ion energy and flux, and the ion energy spread was narrowed by the pulsed plasma.
Pulsed plasmas are important for the fabrication of nanoscale features. Source biasing is generally associated with the control of the ion to radical flux ratio; how the ion energy distribution function varies over a pulse period is also important. In this paper, we experimentally investigate the effect of pulse transients (i.e. power on to power off phases) on ion energy distributions during different RF source power duty cycles (99%–20%) in a compact inductively coupled argon plasma with time average RF power of 150 W at a frequency of 13.56 MHz and pressure of 20 mT (2.67 Pa). The ion energy distributions were measured by retarding field energy analyzer. With the decrease of RF power duty cycle, the increase of ion energy and energy spread is observed and ion energy distribution changes from single peaked to bi-modal. The effect of RF power duty cycle on the ion energy transition is discussed. Fluid and test particle simulations are used to illustrate the origin of features in the measured ion energy distributions. Capacitive coupling from the RF induction coils is highlighted as the origin for important features in the ion energy distributions.
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