The inner diameter measurement of the micro-hole was performed by a tactile microprobing system using a method of the local surface interaction force detection. The inner diameter of the micro-hole was calculated by the least square method based on the probing coordinates obtained by a custom-made micro-coordinate measuring machine. The dispersion of the probing coordinates was investigated by changing the probe approaching direction with respect to the normal direction of the inner side of the micro-hole. During the probing inside the micro-hole, it was confirmed that the dispersion of the probing coordinates increased when the disagreement between the probe approaching direction and the normal direction of the micro-hole at the measured point became large. The influence of the dispersion of the probing coordinates was evaluated through the uncertainty analysis of the inner diameter measurement. It was revealed that the uncertainty of the inner diameter measurement could be improved when limiting the disagreement between the probe approaching direction and the normal direction of the micro-hole to within ±pi/4 rad.
Precision flat surfaces are required for the precision surface plates of measurement instruments and the sliding components of precision machine tools. Precision flat surfaces measuring several tens of millimeters square or more are often created via hand-scraping, which is a hand-finished work. Since a hand-scraped surface is rough, the surface form cannot be measured easily using a typical vertical incident interferometer. An oblique-incident interferometer based on Abramson interferometry has been developed previously for the surface form measurement of hand-scraped surfaces. However, the field of view of the developed oblique-incident interferometer is limited to dozens of millimeters square owing to the size of the optical components and imaging sensor; consequently, the field of view is smaller than the size of the entire hand-scraped surface. A stitching method is introduced herein to expand the size of measuring area of the oblique-incident interferometer. The surface forms of a hand-scraped surface with a partially overlapped area are obtained using an oblique-incident interferometer, and the discrepancies of the inclination and height offset between the surface form data are corrected to calculate the synthetic surface form. Pattern matching is performed when aligning the overlapping area, which reduces the alignment error of the optical system. The effectiveness of the stitching method for the oblique incident interferometer is evaluated based on the cross-correlation coefficient between the datum and corrected profiles.
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