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The carbonaceous hard coating such as Diamond-Like Carbon is one of the materials to prevent surface damage. It was reported that Carbon Nitride (CNx) coating showed superlow friction coefficient when it slid against a Si 3 N 4 ball in N 2 environment. In the case of applying CNx coating for industrial fields, it is necessary to improve adhesion between CNx coating and substrate. In this study, we clarify the effect of interlayer to improve adhesion of CNx coating to WC substrate. 4 different kinds of interlayer materials were prepared. From the scratching test results, adhesion of using CrN and no interlayer was smallest. On the other hand, SiN, CN and DLC interlayers showed high adhesion. From the finite element analysis, interlayer thickness and Young's modulus did not affect to improve adhesion between CNx coating and WC substrate. Key Words 緒 言 実験装置，試験片及び実験方法 2・1 CNx 膜の成膜方法及び試験片