We present a compact laboratory system for near edge soft X-ray fine structure (NEXAFS) spectroscopy that was developed using a laser-plasma light source. The source is based on a double stream gas puff target. The plasma is formed by the interaction of a laser beam with the double stream gas puff target approach. The laser plasma source was optimized for efficient soft X-ray emission from a krypton/helium target in the range of 1.5 to 5 nm wavelength. This emission is used to acquire simultaneously the emission and absorption spectra of soft X-ray light from the source and from the investigated sample using a grazing incidence spectrometer. The measurements in the transmission mode reveal the features near the carbon K-α absorption edge of thin PET film. From those features, the composition of the sample was successfully obtained. The data are in agreement with synchrotron measurements. In the paper, the detailed information about the source, its optimization, the system, spectral measurements and the results are presented and discussed.
To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its unique properties, especially a low coefficient of thermal expansion. In this study, a novel cost-efficient method of multi-beam micromachining of invar will be introduced. The combination of a Meopta beam splitting, focusing and monitoring module with a galvanometer scanner and HiLASE high-energy pulse laser system emitting ultrashort pulses at 515 nm allows drilling and cutting of invar foil with 784 beams at once with high precision and almost no thermal effects and heat-affected zone, thus significantly improving the throughput and efficiency.
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