Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm

Hauschwitz, Petr; Stoklasa, Bohumil; Kuchařík, Jiří; Turčičová, Hana; Písařík, Michael; Brajer, Jan; Rostohar, Danijela; Mocek, Tomáš; Duda, Martin; Lucianetti, Antonio

doi:10.3390/ma13132962

Cited by 16 publications

(14 citation statements)

References 21 publications

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“…An alternative to polygon scanning systems can be beamsplitting by diffractive optical element (DOE) coupled with standard galvo scanning systems 28 – 31 . However, a large number of beams in order of thousands can be problematic due to the large separation distance of standard DOEs (typically > 10 times diffraction limited spot diameter) which results in a large irradiated area thus limiting scanning options due to scan-angle dependent distortions and limited scan area.…”

Section: Introductionmentioning

confidence: 99%

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

Hauschwitz

Martan

Bicistova

et al. 2021

Sci Rep

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A unique combination of the ultrashort high-energy pulsed laser system with exceptional beam quality and a novel Diffractive Optical Element (DOE) enables simultaneous production of 2601 spots organized in the square-shaped 1 × 1 mm matrix in less than 0.01 ms. By adjusting the laser and processing parameters each spot can contain Laser Induced Periodic Surface Structures (LIPSS, ripples), including high-spatial frequency LIPSS (HFSL) and low-spatial frequency LIPSS (LSFL). DOE placed before galvanometric scanner allows easy integration and stitching of the pattern over larger areas. In addition, the LIPSS formation was monitored for the first time using fast infrared radiometry for verification of real-time quality control possibilities. During the LIPSS fabrication, solidification plateaus were observed after each laser pulse, which enables process control by monitoring heat accumulation or plateau length using a new signal derivation approach. Analysis of solidification plateaus after each laser pulse enabled dynamic calibration of the measurement. Heat accumulation temperatures from 200 to 1000 °C were observed from measurement and compared to the theoretical model. The temperature measurements revealed interesting changes in the physics of the laser ablation process. Moreover, the highest throughput on the area of 40 × 40 mm reached 1910 cm2/min, which is the highest demonstrated throughput of LIPSS nanostructuring, to the best of our knowledge. Thus, showing great potential for the efficient production of LIPSS-based functional surfaces which can be used to improve surface mechanical, biological or optical properties.

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Section: Introductionmentioning

confidence: 99%

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

Hauschwitz

Martan

Bicistova

et al. 2021

Sci Rep

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“…High-resolution of required structures results in longer fabrication times, as well as delicate power-handling close to damage threshold to ensure high-quality processing without thermal damage to the surroundings. To improve the fabrication time and use the laser source more efficiently, multi-beam processing can be applied [ 9 ]. However, commonly used diffractive beamsplitters may not provide sufficient freedom in adjusting the spacing between beamlets during process optimization.…”

Section: Introductionmentioning

confidence: 99%

Anti-Reflection Nanostructures on Tempered Glass by Dynamic Beam Shaping

et al. 2021

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Reflectivity and surface topography of tempered glass were modified without any thermal damage to the surroundings by utilizing 1.7 ps ultrashort pulsed laser on its fundamental wavelength of 1030 nm. To speed up the fabrication, a dynamic beam shaping unit combined with a galvanometer scanning head was applied to divide the initial laser beam into a matrix of beamlets with adjustable beamlets number and separation distance. By tuning the laser and processing parameters, reflected intensity can be reduced up to 75% while maintaining 90% of transparency thus showing great potential for display functionalization of mobile phones or laptops.

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“…One of the most promising solutions for industrial utilization of lasers for micromachining is multi-beam processing. In this solution, the incident beam is split into a matrix of sub-beams for simultaneous fabrication inside the optimal processing window [19]. This can be achieved by several techniques including Direct Laser Interference Patterning (DLIP) [20,21] and beam splitting by Diffractive Optical Element (DOE) [22] or Spatial Light Modulator (SLM) [23].…”

Section: Introductionmentioning

confidence: 99%

“…Efficient micromachining with high power-ultrashort laser pulses and 144 sub-beams was also reported by Gillner et al [ 28 ]. More than 784 sub-beams were applied for micromachining of invar in the previous work of authors [ 19 ]. However, to efficiently utilize the new generation of ultrashort laser systems with power above 0.5 kW and millijoule pulse energy [ 29 ] significantly higher number of sub-beams would be required for high-quality micro and nanostructuring together with a new type of DOEs.…”

Section: Introductionmentioning

confidence: 99%

Towards Rapid Fabrication of Superhydrophobic Surfaces by Multi-Beam Nanostructuring with 40,401 Beams

et al. 2021

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Superhydrophobic surfaces attract a lot of attention due to many potential applications including anti-icing, anti-corrosion, self-cleaning or drag-reduction surfaces. Despite a list of attractive applications of superhydrophobic surfaces and demonstrated capability of lasers to produce them, the speed of laser micro and nanostructuring is still low with respect to many industry standards. Up-to-now, most promising multi-beam solutions can improve processing speed a hundred to a thousand times. However, productive and efficient utilization of a new generation of kW-class ultrashort pulsed lasers for precise nanostructuring requires a much higher number of beams. In this work, we introduce a unique combination of high-energy pulsed ultrashort laser system delivering up to 20 mJ at 1030 nm in 1.7 ps and novel Diffractive Laser-Induced Texturing element (DLITe) capable of producing 201 × 201 sub-beams of 5 µm in diameter on a square area of 1 mm2. Simultaneous nanostructuring with 40,401 sub-beams resulted in a matrix of microcraters covered by nanogratings and ripples with periodicity below 470 nm and 720 nm, respectively. The processed area demonstrated hydrophobic to superhydrophobic properties with a maximum contact angle of 153°.

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Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm

Cited by 16 publications

References 21 publications

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

Anti-Reflection Nanostructures on Tempered Glass by Dynamic Beam Shaping

Towards Rapid Fabrication of Superhydrophobic Surfaces by Multi-Beam Nanostructuring with 40,401 Beams

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