Current-injection ultraviolet lasers are demonstrated on low-dislocation-density bulk AlN substrates. The AlGaInN heterostructures were grown by metalorganic chemical vapor deposition. Requisite smooth surface morphologies were obtained by growing on near-c-plane AlN substrates, with a nominal off-axis orientation of less than 0.5°. Lasing was obtained from gain-guided laser diodes with uncoated facets and cavity lengths ranging from 200 to 1500 μm. Threshold current densities as low as 13 kA/cm2 were achieved for laser emission wavelengths as short as 368 nm, under pulsed operation. The maximum light output power was near 300 mW with a differential quantum efficiency of 6.7%. This (first) demonstration of nitride laser diodes on bulk AlN substrates suggests the feasibility of using such substrates to realize nitride laser diodes emitting from the near to deep ultraviolet spectral regions.
A spiral-shaped microcavity heterojunction laser diode fabricated with InGaN multiple quantum wells is demonstrated to operate under current injection conditions and emit unidirectionally. Room-temperature laser operation was achieved for microcavity disk radii ranging from 50 to 350 μm and threshold current densities as low as 4.6 kA/cm2. Unidirectional laser emission is clearly revealed in the far-field pattern with the lateral divergence angle ranging from 60° to 75°. Output power of more than 25 mW was obtained for emission wavelengths near 400 nm.
We demonstrate ultraviolet emission from current-injection AlGaN multiple-quantum-well laser diodes grown on sapphire substrates by metalorganic chemical vapor deposition. Lasing was obtained in gain-guided laser diode test structures with uncoated facets and cavity length ranging from 400 to 1500 μm. Under pulsed bias conditions, threshold current densities as low as 23 kA/cm2 have been achieved for laser diodes with emission wavelengths between 359.7 and 361.6 nm. The maximum output power was 45 mW per facet with differential quantum efficiencies of 1.3%.
AlGaN-based multiple-quantum-well (MQW) heterostructures were irradiated with a pulsed electron beam. Excitation with a beam energy of 12 keV and a beam current of 4.4 mA produced cathodoluminescense at λ=246 nm with a measured peak output power of >200 mW. The emission is dominated by radiative recombination from the MQW up to the maximum tested excitation power density of 1 MW/cm2, as evidenced by unity slope in a double-logarithmic plot of the light output power vs. excitation power density. Monte Carlo simulations of the depth distribution of deposited energy for different beam energies produced good agreement with the measured peak output power vs. beam energy for an assumed carrier diffusion length of ∼200 nm.
We demonstrate ultraviolet InGaN/InAlGaN multiple-quantum-well laser diodes operating under continuous-wave (cw) conditions. The laser diodes were grown on sapphire substrates by metalorganic chemical vapor deposition. Under pulsed bias conditions, we have achieved threshold current densities as low as 5 kA/cm2 for laser diodes with emission wavelengths between 368 nm and 378 nm and have demonstrated lasing at 363.2 nm at room temperature, the shortest wavelength yet reported for a semiconductor laser diode. The cw operation up to a heat sink temperature of 40 °C was demonstrated on a series of narrow ridge-waveguide devices processed with chemically assisted ion beam etched mirrors and high reflective coating on both facets. The shortest wavelength emission under cw operation conditions was 373.5 nm with output powers of more than 1 mW.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.