We experimentally demonstrate wavelength-independent couplers based on an asymmetric Mach-Zehnder interferometer on a monolithic silicon-photonics platform in a state-of-the-art CMOS foundry. The devices are also designed to exhibit fabrication tolerant performance for arbitrary splitting ratios. We have developed a semi-analytical model to optimize the device response and the reliability of the model is benchmarked against 3D-FDTD simulations. Experimental results are consistent with the simulation results obtained by the model and show uniform performance across different wafer sites with a standard deviation for the splitting ratio of only 0.6% at 1310 nm wavelength. The maximum spectral deviation of the splitting ratio (3-dB splitter) is measured to be 1.2% over a wavelength range of at least 80 nm and the insertion loss ranges from 0.08 to 0.38 dB. The wavelength-independent coupler has a compact footprint of 60 × 40
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We experimentally demonstrate wavelength-independent couplers (WICs) based on an asymmetric Mach-Zehnder interferometer (MZI) on a monolithic silicon-photonics platform in a commercial, 300-mm, CMOS foundry. We compare the performance of splitters based on MZIs consisting of circular and 3rd order (cubic) Bézier bends. A semi-analytical model is constructed in order to accurately calculate each device’s response based on their specific geometry. The model is successfully tested via 3D-FDTD simulations and experimental characterization. The obtained experimental results demonstrate uniform performance across different wafer sites for various target splitting ratios. We also confirm the superior performance of the Bézier bend-based structure, compared to the circular bend-based structure both in terms of insertion loss (0.14 dB), and performance consistency throughout different wafer dies. The maximum deviation of the optimal device’s splitting ratio is 0.6%, over a wavelength span of 100 nm. Moreover, the devices have a compact footprint of 36.3 × 3.8 μm2.
We describe a fabrication tolerant WDM filter with cascaded MZI, using wavelength inde- pendent couplers (WICs). 3D FDTD simulations show broadband device operation with a spectral shift per waveguide width offset of 6.3 pm/nm.
We propose apodized DBR bends for a compact (0.0024 mm2/ch) 4 channel cWDM filter. Simulations show -39 dB sidelobe suppression, -32 dB cross-talk, and -0.05 dB insertion loss for an optimized device configuration.
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