This paper discusses the process technology to fabricate multilayer-Polydimethylsiloxane (PDMS) based microfluidic device for bio-particles concentration detection in Lab-on-chip system. The micro chamber and the fluidic channel were fabricated using standard photolithography and soft lithography process. Conventional method by pouring PDMS on a silicon wafer and peeling after curing in soft lithography produces unspecific layer thickness. In this work, a multilayer-PDMS method is proposed to produce a layer with specific and fixed thickness micron size after bonding that act as an optimum light path length for optimum light detection. This multilayer with precise thickness is required since the microfluidic is integrated with optical transducer. Another significant advantage of this method is to provide excellent bonding between multilayer-PDMS layer and biocompatible microfluidic channel. The detail fabrication process were illustrated through scanning electron microscopy (SEM) and discussed in this work. The optical signal responses obtained from the multilayer-PDMS microfluidic channel with integrated optical transducer were compared with those obtained with the microfluidic channel from a conventional method. As a result, both optical signal responses did not show significant differences in terms of dispersion of light propagation for both media.
This paper reports the design study of optical transducer for bioparticles detector integrated in Lab-on-Chip (LoC) system. Optical detector has been identified as potential device for real time detection of bioparticles because of its simple and compact structure, high sensitivity and easy of integration with microfluidic system. In this study, the absorbance detection using optical transducer is selected due to its label free nature and relatively simple implementation. The analysis work is focused on the characteristics of PIN photodetector simulated using Atlas and Athena software. It is observed that the lateral SOI based PIN photodiode exhibits the behavior of silicon PIN photodiode characteristics. The result also shows that Peak intensity at wavelength of 400nm was achieved and therefore, it is suitable to be used as bioparticles detector in UV/Vis spectrum.
Temperature process control is an integral element in the syllabus of control engineering. Generally, industrial processes can be simulated via controller and various tunings methods. sequence of experiments in basic temperature control process. The experiments are performed on temperature control plant using resistor temperature detector distributed control system laboratory. optimum tuning of the controller using Ziegler ultimate gain and response of various values to the temperature control. and thermocouple sensors.
Graphene oxide thin films were fabricated on 8-inch silicon/silicon dioxide (Si/SiO2) wafers for nanoelectronic applications. The fabrication was performed using an ultrasonic spray coating method and reduced by rapid thermal processing (RTP). The micrometer-sized droplets from an ultrasonic spray of stable dispersion Graphene Oxide (GO) in ethanol form uniforms films on large-area silicon substrates. Optical microscope images clearly showed uniform thin films resulting from the overlapped of GO dispersion droplets. The chemical and structural parameter characterization were performed by field emission scanning electron microscopy and X-ray photoelectron spectroscopy (XPS). The spray coating process using an ultrasonic atomizer system with optimum parameters and the thermal reduction process using RTP at 1100 °C produces low sheet resistance values ranging from 1 to 4 kOhms/sq with non-uniformity less than 20%.
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