This work presents a study of intrinsic zinc oxide thin film as ozone sensor based on the ultraviolet ͑UV͒ photoreduction and subsequent ozone re oxidation of zinc oxide as a fully reversible process performed at room temperature. The films analyzed were produced by spray pyrolysis, dc and rf magnetron sputtering. The dc resistivity of the films produced by rf magnetron sputtering and constituted by nanocrystallites changes more than eight orders of magnitude when exposed to an UV dose of 4 mW/ cm 2 . On the other hand, porous and textured zinc oxide films produced by spray pyrolysis at low substrate temperature exhibit an excellent ac impedance response where the reactance changes by more than seven orders of magnitude when exposed to the same UV dose, with a response frequency above 15 kHz, thus showing improved ozone ac sensing discrimination.
Indium oxide (InOx) films with a thickness of 10–1100 nm were deposited onto Corning 7059 glass and silica substrates at various substrate temperatures. An unusual decrease of the lateral grain size with increasing substrate temperature during deposition was found. The changes in the conductivity of the films after exposure to ultraviolet light in vacuum and subsequent oxidation in ozone atmosphere were analyzed and related to their structural and morphological properties. It is suggested that the photoreduction and oxidation treatments affect only a thin layer less than 10 nm at the surface of the film, while the minimum bulk conductivity is mainly determined by the structural and morphological properties.
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