Spectroscopic ellipsometry and x-ray diffraction are used to investigate the metal-insulator transition in V2O5 films. Below and above Tc no significant change in the (001) peak is observed, but both n and k spectra undergo remarkable changes over the entire photon energy range. The SE and XRD results indicate that the V2O5 film undergoes a MIT without a structural phase transition near 280 °C. Further the MIT is confirmed by measurement of the resistance with temperature.

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The relationship between the first-order metal-insulator transition (MIT) and the structural phase transition (SPT) in VO2 film is analyzed by dielectric function, optical conductivity, plasma energy, and electrical conductivity. The MIT and SPT temperatures in VO2 films were approximately 68 and 75 °C, respectively, with an intermediate phase existing between 68 and 75 °C. The optical and electrical results indicate that the first-order MIT in VO2 films is not driven by the SPT