In this paper, a combined feedback-feedforward control design scheme is presented to enhance the tracking performance of a piezo-actuated micropositioning stage by compensating the nonlinear hysteretic behavior of the piezoelectric actuator and model uncertainties of the system. Detailed investigation of the presented control scheme is performed not only in simulation by analyzing the robust stability and robust performance but also in real-time with motion trajectories of multiple frequencies. To design the presented control scheme, first of all, the dynamic model of the system is identified from the real-time experimental data by using the recursive least squares parameter adaptation algorithm. Then, Dahl hysteresis model is considered to represent the nonlinear hysteretic behavior of the piezoelectric actuator. To deal with this hysteresis nonlinearity, Dahl feedforward compensator is designed without involving inverse model calculations to avoid any computational complexity. This feedforward compensator is then combined with µ-synthesis robust feedback controller which is designed in the presence of model uncertainties of the system. The presented control scheme ensures the boundedness of the closed-loop signals and the desired tracking performance of the considered micropositioning stage. Finally, experimental tests are conducted with motion trajectories of multiple frequencies for the validation of the control scheme. An average improvement of 95% in compensating the hysteresis nonlinearity and 80% in reducing the tracking error is achieved which demonstrates the efficacy of the presented control scheme. INDEX TERMS Dahl feedforward compensator, hysteresis nonlinearity, micropositioning, model uncertainties, piezoelectric actuator, µ-synthesis robust feedback controller.

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