Robust Tracking Control of Micro/Nanopositioning Stage with High Frequency Vibrations

Ali, Mahmoud al Ahmad; Ahmad, Irfan; Omotoso, Hammed Olabisi

doi:10.1109/icmsao.2019.8880457

2019 8th International Conference on Modeling Simulation and Applied Optimization (ICMSAO) 2019

DOI: 10.1109/icmsao.2019.8880457

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Robust Tracking Control of Micro/Nanopositioning Stage with High Frequency Vibrations

Mahmoud al Ahmad Ali

Irfan Ahmad

Hammed Olabisi Omotoso

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Robust Tracking Control of Micro/Nanopositioning Stage with High Frequency Vibrations

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References 18 publications

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