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Two facilities for the generation of energetic atomic oxygen beams have been developed to investigate the degradation of materials in low Earth orbit. An atomic oxygen generator using an ion beam method was used mainly for studying the effect of kinetic energies on surface reactions. Another generator combined pulsed supersonic valve and pulsed YAG laser systems for long-duration exposure experiments without maintenance. The velocity of atomic oxygen was measured by a retarding energy analyzer and a plasma time-of-flight analyzer. Increments of mass in silver films due to the formation of oxides show that the fluxes of atomic oxygen exceed 10 12 ~ 10 13 atoms/cm 2 s. X-ray photoelectron spectroscopy spectra of Ols on a single MoSi crystal exposed to energetic atomic oxygen showed the existence of energy dependence of the surface reaction.