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Summary Ion beam mixing of Fe/Si bilayers, induced by 100 keV 40Arions at room temperature was investigated. Rutherford backscattering spectroscopy (RBS), atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) were applied for structural characterization. The main focus of this study was on the influence of the substrate structure on interface mixing. The influence of the substrate structure is due to the two classes of irradiated bilayers, Fe thin films deposited on crystalline or pre‐amorphized Si substrates. An about 76% higher efficiency of atomic transport across the pre‐amorphized Fe/a‐Si interface as compared to that of Fe/c‐Si bilayers was observed.

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The mVINIS ion source is a part of the TESLA Accelerator Installation, in Belgrade. It is an ECR ion source used as a stand-alone machine delivering multiply charged ion beams to a low energy experimental channel for modification of materials (the L3A channel). In the future, it will be also used as a heavy ion injector for the VINCY Cyclotron. In this article we present the recently introduced hardware and software changes resulting in an improved operation of the mVINIS: the emittance measurement system, the inlet system for precious gases, the improved control system of the microwave generator, a new power supply for the injection stage coil, and the improved program for recording and analysis of the ion beam spectra.