International audienceThis article studies the skip, under some assumptions, of process control operations. The case of one tool, one enhanced buffer and one metrology tool of a monotonic parameter is analysed. This article presents circumstances in which control plan can be optimised due to the buffer's behaviour. After discussing the industrial issue of defectivity, this article presents a literature review followed by the model and steps towards industrial development. Then demonstrator, which is applied at a case study of defectivity sampling, is presented. A test of over a 300-mm wafer fabrication data set shows serious improvements - around 35% of defectivity controls have been skipped compared to the static sampling plan
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