This paper describes a fabrication process of hollow microneedle arrays with a sharp beveled tip for transdermal drug delivery. A master is fabricated through a double deep x-ray lithography process. First, a polymethylmethacrylate (PMMA) sheet is exposed to produce single PMMA parts with a sawtooth profile. The tip angle of each tooth determines the final tip angle of the microneedles. The PMMA parts are assembled and glued on a conductive substrate and then exposed through a second x-ray mask containing an array of hollow triangles as absorbing structures. A metal layer is then electrodeposited around the needles in order to form the future base of the array. A polyvinyl alcohol (PVA) solution is cast on top of the master to form a negative mold of the microneedle array after a low temperature curing and peel-off steps. A liquid PMMA solution is cast on top of the PVA negative mold and after the full PMMA polymerization the PVA is dissolved in water. This fabrication method can be performed in a non-clean room environment and requires little instrumentation. It is therefore compatible with a low-cost mass-fabrication scheme.
The electronic and magnetic properties of the colossal magneto resistance (CMR) compound Sr2FeMoO6 have been studied using different experimental techniques, namely X‐ray diffraction (XRD), X‐ray photoelectron spectroscopy (XPS), and X‐ray absorption spectroscopy (XAS). Furthermore, the magnetic properties have been studied in the temperature range of 4.2 K–800 K. The data confirm a highly ordered double perovskite crystal structure and is consistent with the tetragonal structure with 14/mmm symmetry. The Fe L edge has been probed by means of XAS, and comparison with results for a series of other iron oxides reveals a mixed valence state of Fe2+ and Fe3+. XPS of the Mo 3d and Fe 3s core levels confirms this point of view indicating a mixed valence state involving around 30% Fe3+–Mo5+ and 70% Fe2+–Mo6+ states, in good agreement with paramagnetic measurements which suggest 60% Fe2+ ions. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
This report discusses the optimization strategy, the theoretical background and first experimental data of a new refractive lens for focusing X-rays. In order to reduce the absorption of X-rays in this transmission lens, optically passive material was removed from the necessarily concave lens shape in a highly regular pattern. The feature dimensions require lens production and replication by deep X-ray lithography, which allows shaping in only one dimension. Consequently such a lens can focus in one direction only, so a crossed lens pair is needed for two-dimensional focusing. The single lens is composed of two large prisms of millimetre size, which touch each other at one of the tips, like an old sand clock. Each large prism contains a highly regular structure of essentially identical prism-like smaller segments. The first lens prototypes focused an X-ray beam with a vertical size of 500 microm and a photon energy of 8 keV to a line with a width of only 2.8 microm. This is only slightly worse than the line width of 1.73 microm expected for its focal length of f = 2.18 m. The photon density enhancement in the focus was 25, but could have been larger as the lens can intercept a beam height of 2.6 mm.
Microfabricated single-cell capture and DNA stretching devices have been produced by injection molding. The fabrication scheme employed deep reactive ion etching in a silicon substrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposes technical solutions to fabrication challenges associated with chip sealing and demolding of polymer high-volume replication methods. UV-assisted thermal bonding was found to ensure a strong seal of the microstructures in the molded part without altering the geometry of the channels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting two larger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the other device single-HeLa cells were captured against a micro-aperture connecting two larger microfluidic channels. Different dry etching processes have been investigated for the master origination of the cell-capture device. The combination of a modified Bosch process and an isotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightly positively tapered sidewalls with negligible undercut at the mask interface.
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