A high stability in-circuit reprogrammable technique control system for a capacitive MEMS accelerometer is presented. Modulation and demodulation are used to separate the signal from the low frequency noise. A low-noise low-offset charge integrator is employed in this circuit to implement a capacitance-to-voltage converter and minimize the noise and offset. The application-specific integrated circuit (ASIC) is fabricated in a 0.5 m one-ploy three-metal CMOS process. The measured results of the proposed circuit show that the noise floor of the ASIC is -116 dBV, the sensitivity of the accelerometer is 66 mV/g with a nonlinearity of 0.5%. The chip occupies 3.5 2.5 mm 2 and the current is 3.5 mA.
This paper describes a 10-bit 2.5 Msample/s successive approximation analog-to-digital converter (ADC) for SoC system. Based on conventional successive approximation ADC architecture a new and faster solution is used. The new solution consists of bootstrap switch, capacitors for sample-hold (S/H) circuit and DAC, using an offset cancellation method and there is no need for any active element. Together with an added bit and an offset compensation comparator the speed and accuracy is increased. The ADC exhibits higher 9 effective number of bits (ENOB) for sample rate to 2.5 Ms/s. The ADC consumes 3.1 mW from a 1.8 V supply and occupies about 0.25 mm 2 . The measured SNR is 56.05 dB.
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