This paper deals with the diagnostics of a high power pulsed magnetron sputtering device (HPPMS). The HPPMS plasma was spatially and temporally characterized in the post-discharge using optical absorption spectroscopy and Langmuir probe time resolved measurements. A circular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The titanium densities (neutrals and ions) were measured by a pulsed resonant absorption spectroscopy technique. We found an ionization degree higher than 0.5. Comparison beetween the experimental results and a simple one-dimensional model of diffusion shows that in these conditions, the transport of neutral and ionized sputtered atoms is mainly controlled by diffusion (ambipolar diffusion for ions).
This study deals with the grafting of carbohydrate monomers on poly(ethylene terephthalate) fibers by double argon plasma treatment. Two monomers were used: allyl alpha-D-galactopyranoside and 2-methacryloxyethyl glucoside. The quantity of grafted carbohydrates was determined by phenol/sulfuric acid colorimetric titration. The graft density was observed to vary according to the monomer used. Allyl alpha-D-galactopyranoside yields to smaller graft densities compared to 2-methacryloxyethyl glucoside, suggesting transfer reactions occurring at the surface with allyl alpha-D-galactopyranoside. Fibers with the highest graft levels were obtained with the higher monomer concentration and the lower quantity of fiber treated in a plasma reactor. The grafting density can be modulated by the monomer concentration and mass of fiber exposed in the plasma reactor. For 0.5 mg of fibers, the graft densities for 23 and 68 mM allyl alpha-D-galactopyranoside are, respectively, 18 and 35 nmol/cm2. For 0.5 mg of fibers, the graft densities for 19 and 38 mM 2-methacryloxyethyl glucoside are, respectively, 150 and 250 nmol/cm2. Comparative study without the preactivation treatment shows the efficiency of the preactivation: for a mass of fiber of 0.5 mg and a 2-methacryloxyethyl glucoside concentration of 38 mM, the grafting density without plasma pretreatment is 38 nmol/cm2. Attenuated total reflectance Fourier transform infrared spectra confirmed the anchoring of the glycopolymer onto the poly(ethylene terephthalate) surfaces. Atomic force microscopy and scanning electronic microscopy pictures indicated their morphological changes.
This paper deals with the characterization of an ionized physical vapour deposition (IPVD) reactor using an additional microwave plasma. The IPVD reactor was spatially characterized using optical emission spectroscopy, optical absorption spectroscopy and Langmuir probe measurements. A rectangular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The influence of the microwave power (between 0 and 900 W) and the magnetron discharge current (0.5 and 2 A) on the densities of the titanium species (neutral and ionic), argon emission line intensity and titanium and argon temperature variations was investigated. The titanium temperature and densities were measured using the pulsed resonant absorption spectroscopy technique. The neutral and ion fluxes on the substrate were deduced from these measurements. It was found that the ratio φ(Ti + )/φ(Ti n ) increases by a factor of 30 when additional microwave plasma is used. Moreover, we point out the temperature as a key parameter in plasma diagnostic interpretations.
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