The ever-increasing complexity of integrated circuits and their enabling process technology has accelerated the increase in data volume of post-RET data which is input to the photomask manufacturing industry. OASIS -the new stream format that has been developed by a working group under the sponsorship of the SEMI Data Path Task Force enables the representation of IC layout data in a much more compact form than GDSII and facilitates the incorporation of hierarchical data into the mask-making infrastructure. OASIS achieves on average a >10x reduction in file size compared to GDSII files and structures the data in a way, which allows a straightforward translation from a hierarchical format to the required flat mask perspective. Owing to the efficiency in representing the data, OASIS files are smaller than commonly used flat exchange formats -like MEBES, thus enabling an efficient hierarchical data flow both from the processing as well as the file handling prospective. The implementation of OASIS into post-tapeout data flows will be discussed and experimental results on OASIS-based data preparation flows will be shown.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.