The photoreactivity of an n-octadecyltrimethoxysilane self-assembled monolayer (ODS-SAM) on a Si substrate was investigated under the irradiation of vacuum ultraviolet (VUV) light of 172 nm in wavelength. The results of water contact angle, film thickness, and X-ray photoelectron spectroscopy analysis showed that the ODS-SAM decomposed gradually due to the VUV light exposure. Oxidized products, that is, -COOH groups, had formed before the ODS-SAM was completely decomposed and removed from the substrate. Coplanar ternary organosilane SAM microstructures have been successfully fabricated by employing the reaction between -OCH3 functional groups with -COOH groups on the VUV-modified ODS-SAM.

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Unique hierarchical pore structures were fabricated by simply irradiating an electron beam onto silicone grease films. The hierarchical pore structures consisted of micrometer‐sized pores and macroporous walls. Due to the high surface roughness, the hierarchical pore structures exhibited both superhydrophobicity with a water contact angle (CA) of 170° and superhydrophilicity with an extremely low water CA of 3° after the chemical treatment of the surfaces. In addition to the hierarchical pore structures, sponge‐like pore structures were also fabricated by the electron irradiation of silicone grease films.

An excimer lamp irradiating vacuum ultraviolet (VUV) light 172 nm in wavelength has been applied to the photochemical conversion and micropatterning of a p-chloromethylphenylsilyl self-assembled monolayer (CMPhS-SAM) in the presence of atmospheric oxygen. The terminal functional groups of the CMPhS-SAM, the -CH 2 Cl, were photochemically converted to polar functional groups, mostly -COOH. This chemical conversion was accelerated with atomic oxygen species photochemically generated through VUV excitation of atmospheric oxygen molecules. By irradiating a CMPhS-SAM sample with VUV thorough a photomask, a microchemical pattern consisting of hydrophobic and hydrophilic regions was formed on the SAM surface. Furthermore, by selectively depositing n-octadecyltrimethoxysilane (ODS) molecules on the hydrophilic region, a binary microstructure consisting of CMPhS and ODS was successfully fabricated with an optimum spatial resolution of 1 mm.

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