This paper presents the use of a novel fabrication technique to make three-dimensional nanostrucmres with nanoscale features that can be used for electromechanical sensors. The process uses conventional microfabrication techniques to create a planar pattem in a SiGe/Si bilayer that then self-assembles into three-dimensional (3-D) structures during a wet etch release, An additional metal layer is integrated for higher conductivity. Results from the fabrication of the structures are demonstrated.Nanomanipulation inside an SEM was conducted to probe the structures for mechanical and electrical characterization. The experimental characterization results were validated by finite element simulation results.
In this paper we present work towards electromagnetic actuation of paramagnetic particles with three-dimensional nanocoils. Self-assembled semiconductor/metal nanocoils have been used, though the concept is applicable to other types of nancoils. The particles are paramagnetic polysterene particles with iron oxide. The feasibility of such nanoelectromagnetic actuators is investigated through nanomanipulation experiments in a scanning electron microscope (SEM). Electromagnetic fields created by nanoelectromagnets are investigated through simulation. The simulation results indicate high performance of nanocoils in terms of the achievable field gradient, a key parameter for electromagnetic actuation. Results from analysis, simulation, and experiments indicate that electromagnetic nanoactuators are feasible, and have potential applications in nanoelectromechanical systems (NEMS).
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