Raman spectroscopy and sheet resistance measurements were used to study the preparation processes of low-resistance p-type 4H-SiC by Al ion implantation with ion doses of 2.45×1012 - 9.0×1014 cm-2 and annealing treatment with temperatures of 1700 - 1900 °C. Greatly different from the LOPC (longitudinal optical phonon-plasmon coupled) Raman mode found from the sample of doping 4H-SiC during epitaxial growth, no significant influence on the surface concentration could be found for the longitudinal optical (LO) mode of Al-implanted 4H-SiC samples. When the Al surface concentration is larger than around 1018 cm-3, it was found that the intensity of the LO+ Raman peak (~ 980 - 1000 cm-1) increases and its full width at half maximum (FWHM) drops with the increase of surface concentration after annealing treatment. Moreover, for surface concentrations above 1018 cm-3, the LO+ Raman peak showed a left shift towards the LO peak, which could be related to the increase of free carrier concentration in the Al-implanted 4H-SiC samples. After higher annealing temperatures of 1800 °C and 1900 °C, the crystallinity of Al-implanted 4H-SiC was found to be improved compared to annealing at 1700 °C for surface concentrations larger than 1018 cm-3, which is consistent with the results of sheet resistance measurements.
High-speed atomic force microscopy (AFM) has been rapidly developed in recent years. To reduce the oscillation of the scanner, a single-tone sinusoidal wave is widely used as a scanning wave rather than a triangular wave in high-speed AFM. However, the sinusoidal wave is nonlinear, resulting in a nonconstant relative linear velocity between the sample and the tip while scanning in the x-direction. If a traditional proportional-integral controller is still used as a feedback controller in the z-direction, the control errors will be enormous. Therefore, the paper proposes a new adaptive velocitydependent proportional-integral controller. The relationship between the proportional-integral parameters and the linear velocity is achieved by fitting the experimental results. The adaptive and traditional controllers are compared against each other in some examples. The experiments demonstrate that the adaptive controller decreases the control errors in the z-direction to a half, which provides more precise AFM images.
Information theory is used to analyze the character of signal peptide quantitatively, especially residents. On the basis of the above analysis, a method named simplified information-matrix has been developed to predict the cleavage sites of signal peptides. A comparison between the results of weight-matrix and simplified information-matrix is presented.
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