The effect of the substrate orientation and the supersaturation on the growth rate and doping level of vapor grown GaAs is considered. Experimental results are discussed in terms of crystal growth theory developed by BURTON, CABRERA, FRANK and CHERNOV (BCFCh). It is shown that the main predictions of theory are in agrocment with the experimental results. A t the same time experimental results, on the whole, are more complicated than predicted by simple crystal growth model. It can be concluded that the BCFCh-theory is applicable for analysing the growth rate and doping lcvel anisotropy for vapor grown crystals. PaccMaTpmnaeTcn BnHmEie opnemasm n o~n o m~u M nepecmueatia Ha CKOPOCTL pocTa M yposem nerMposaHEiH ~B T O~~M T~I~C H~~~H O~O apceHma rannm. &a cTannoB, P~~B M T~H B pa6o~ax IjapToHa, KaBpepa, @pama M YepHosa ( E K Q q ) . 06cymne~m 3I(CIIePMMeHTaJIbHbIX pe3ynbTaTOB IlpPiBJIeKaeTCH TeOPMfl POCTa KPM-nOMi3aH0, YTO OCHOBHbIe 3aKOHOMePHOCTH, BbITeHaIOUIHe 113 PaCCMaTPMBaeMOfi TeOpHM , COrJIaCylOTCH C Ha6nIOAaeMHMEi 3KCIIepMMeHTaJIbH0, XOTII IIOCJIeLWEie HOCTEl IlpHMeHeHMR TeOpIlM B K Q q AJIH aHaJIM3a aHU30TpOIlEiM CKOPOCTM pOCTa M YPOBHR JIerMpOBaHHH KpMCTaJlJlOB, BhIpaUIMBaeMJdX B ra30TpaHCIIOpTHbIX CHCTe-Max. B pane cnyqaeB O K~~H B~I O T C F I 6onee C J I O~H H M I I . AenaeTccI BMBOH o qenecoo6paa-
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