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Magnetic properties of multilayers, consisting of nanogranular (Co40Fe40B20)50(SiO2)50 layers as thin as magnetic granule diameter alternating the α-Si:H or SiO2 layers and the single layer film (Co40Fe40B20)50(SiO2)50 with the thickness much larger than the magnetic granule diameter are reported and compared. The thick single layer film is ferromagnetic but the multilayer film with the ultrathin granular layers and SiO2 spacer is superparamagnetic. This is interpreted as the result of increasing percolation threshold in the 2D granular media above 50% concentration of magnetic granules in the multilayer with the nonmagnetic and dielectric SiO2 spacer. The multilayer with the α-Si:H spacer is superparamagnetic at 300 K but it becomes ferromagnetic, when temperature is below 250 K. It is assumed to be resulted from the exchange interaction of magnetic granules through the semiconductor α-Si:H layers. The value of exchange interaction through the semiconductor spacer is estimated.

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