Tuning the process pressure at the deposition of the passivation layers has been suggested in the way of controlling the threshold voltage of a-IGZO TFTs, making it possible to employ gate driver integration. It has showed that V th linearly changes with the pressure (ΔV th /ΔPressure~3.5V/100Pa). A 3.2 inch WVGA AMLCD with integrated gate driver circuits were successfully demonstrated using the enhancement mode BCE type bottom gate a-IGZO TFTs.
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