We report a new ion source development for inner wall pipe coating and materials modification. The ion source deposits coatings simultaneously in a 360° radial geometry and can be used to coat inner walls of pipelines by simply moving the ion source in the pipe. Rotating parts are not required, making the source ideal for rough environments and minimizing maintenance and replacements of parts. First results are reported for diamond-like carbon (DLC) coatings on Si and stainless steel substrates deposited using a novel 360° ion source design. The ion source operates with permanent magnets and uses a single power supply for the anode voltage and ion acceleration up to 10 kV. Butane (C4H10) gas is used to coat the inner wall of pipes with smooth and homogeneous DLC coatings with thicknesses up to 5 μm in a short time using a deposition rate of 70 ± 10 nm min(-1). Rutherford backscattering spectrometry results showed that DLC coatings contain hydrogen up to 30 ± 3% indicating deposition of hydrogenated DLC (a-C:H) coatings. Coatings with good adhesion are achieved when using a multiple energy implantation regime. Raman spectroscopy results suggest slightly larger disordered DLC layers when using low ion energy, indicating higher sp(3) bonds in DLC coatings. The results show that commercially interesting coatings can be achieved in short time.
Micrometre thick diamond-like carbon (DLC) coatings produced by direct ion deposition were implanted with 30 keV Ar+and transition metal ions in the lower percentage (<10 at.%) range. Theoretical calculations showed that the ions are implanted just beneath the surface, which was confirmed with RBS measurements. Atomic force microscope scans revealed that the surface roughness increases when implanted with Ar+and Cu+ions, whereas a smoothing of the surface from 5.2 to 2.7 nm and a grain size reduction from 175 to 93 nm are measured for Ag+implanted coatings with a fluence of1.24×1016 at. cm−2. Calculated hydrogen and carbon depth profiles showed surprisingly significant changes in concentrations in the near-surface region of the DLC coatings, particularly when implanted with Ag+ions. Hydrogen accumulates up to 32 at.% and the minimum of the carbon distribution is shifted towards the surface which may be the cause of the surface smoothing effect. The ion implantations caused an increase in electrical conductivity of the DLC coatings, which is important for the development of solid-state gas sensors based on DLC coatings.
Diamond-like carbon (DLC) coatings were deposited with a new direct ion deposition system using a novel 360 degree ion source operating at acceleration voltage between 4 and 8 kV. Cross-sectional TEM images show that the coatings have a three layered structure which originates from changes in the deposition parameters taking into account ion source condition, ion current density, deposition angles, ion sputtering and ion source movement. Varying structural growth conditions can be achieved by tailoring the deposition parameters. The coatings show good promise for industrial use due to their high hardness, low friction and excellent adhesion to the surface of the samples.
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