High Energy Radial Deposition of Diamond-Like Carbon Coatings

Abstract

Diamond-like carbon (DLC) coatings were deposited with a new direct ion deposition system using a novel 360 degree ion source operating at acceleration voltage between 4 and 8 kV. Cross-sectional TEM images show that the coatings have a three layered structure which originates from changes in the deposition parameters taking into account ion source condition, ion current density, deposition angles, ion sputtering and ion source movement. Varying structural growth conditions can be achieved by tailoring the deposition parameters. The coatings show good promise for industrial use due to their high hardness, low friction and excellent adhesion to the surface of the samples.

Effects of Air Exposure on Hard and Soft X-ray Photoemission Spectra of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films

“…The dependence profile of the sp 3 bonding fraction estimated from HAXPES and SXPES for Group II samples are in good agreement, not only with each other but also with the hardness dependence profile. This means that the estimation of the sp 3 fraction is precise, since the hardness proportionally increases with the sp 3 fraction [34,35]. On the other hand, the substrate temperature dependence profile of the sp 3 fraction estimated from SXPES for Group I, obviously deviates from that of hardness.…”

Ferromagnetism in a diamond-like carbon film after nickel implantation

“…Different methods of deposition can be used to deposit DLC films [2][3][4][5][6][7]11]. In this work, the films were produced through MSIBD.…”

“…DLC is well known for its superior mechanical properties and hence it is widely used by the coating industry [1]. Recent interest in this field is focused on widening the areas of applications of ion beam based DLC thin films [2][3][4][5][6][7]. In our previous work, we presented the results of low energy transition metal ion implantation into DLC films and their possible applications in gas sensors [2].…”

Influence of the Carbon Ion Implantation on the Adhesion and Properties of Amorphous Carbon Films on Germanium

“…Повышение адгезии при сохранении других необходимых характеристик, таких как оптические свойства, твердость, -одна из важных задач. Известны работы, в которых синтез углеродных пленок из ИП осуществляется при различных энергиях в диапазоне от 40 до 5 000 эВ [7][8][9][10]. В отдельных случаях удается получить высококачественное покрытие.…”