Vacuum chuckS are usually used in ultra− precision 宣 uming ofthin plates like magnetic aluminum di5cs , 重 or which high machining accu 瓰 cy is absolutely important . Especially , high ferrn acc 町 acy of machi 皿ed ' discs can be expected of porous vacuum chucks because they are superior on uniformity of s 叩 porting rigidity to ethe 【 types of vacuum chucks . Consequently ∫ final purpose of this study is to develop a new porous vacuum chuck suitable for ultra − precision turning of thin plates . As a first s ' tep , the ne 脚 porous
It is well known that brittle materials such as glasses, silicon and so on, can be machined ductile mode cutting like soft metals when the depth of cut is less than critical depth. Face turning using R shaped tool were carried out two types of cutting method (Extreme low feed cutting and Extreme small depth cutting) to distinguish brittle mode from ductile mode by AE signal and cutting forces. Perfectly mirrored surface with roughness (PV) of several tens nanometers can be obtained when maximum undeformed chip thickness was thin in extreme low feed cutting. RMS value of AE signal was larger and cutting force ratio (Thrust / Principal force) was lower when PV of machined surface was larger.
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