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Combined with terahertz (THz) time-domain spectroscopy, THz near-field microscopy based on an atomic force microscope is a technique that, while challenging to implement, is invaluable for probing low-energy light-matter interactions of solid-state and biomolecular nanostructures, which are usually embedded in background media. Here, we experimentally demonstrate a broadband THz pulse near-field microscope that provides subsurface nanoimaging of a metallic grating embedded in a dielectric film. The THz near-field microscope can obtain broadband nanoimaging of the subsurface grating with a nearly frequency-independent lateral resolution of 90 nm, corresponding to ∼ λ/3300, at 1 THz, while the AFM only provides a flat surface topography.

We present quantitative coherent measurements of scattering pulses and spectra in terahertz apertureless near-field microscopes. Broadband near-field image contrasts for both amplitude and phase spectra are measured directly from time-domain scattering signals with an unprecedentedly high single-scan signal-to-noise ratio (∼48 dB), with approach curves for both short (<200 nm) and long (up to 82 μm) ranges. By using the line dipole image method, we obtain quantitative broadband THz imaging contrasts with nanoscale resolution.

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