1999
DOI: 10.1016/s0957-4158(99)00006-9
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Inverse kinematic modeling of a coupled flexure hinge mechanism

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Cited by 89 publications
(41 citation statements)
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“…In Ref. [17], Ryu et al proposed an inverse kinematic model and developed the relationship between the output displacement and input voltage for the mechanism designed in Ref. [16].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…In Ref. [17], Ryu et al proposed an inverse kinematic model and developed the relationship between the output displacement and input voltage for the mechanism designed in Ref. [16].…”
Section: Introductionmentioning
confidence: 99%
“…In order to reduce the effect of the temperature gradient on the compliant mechanism, many micro-positioning stages based on the symmetric compliant parallel manipulators were developed [16][17][18]. Ryu et al [16] developed a xyh micro-motion stage which consist of a monolithic flexure hinge mechanism with three piezoelectric actuators.…”
Section: Introductionmentioning
confidence: 99%
“…Ryu et al [21] developed a micro-motion stage with three degrees-of-freedom. The X Y θ stage uses three piezoelectric actuators and a monolithic flexure hinge mechanism that is designed to provide large θ motion.…”
Section: State Of the Artmentioning
confidence: 99%
“…특히 나노 분야에 이용되는 계측 시스템의 경우, 위치 결정용 초정밀 스테이지의 개발은 필수적인 요건이라 할 수 있으며 이에 따라 초정밀 스테이지의 성능 조건을 만족시키기 위하여 다양한 구동기와 이동 가이드의 조합이 적용되어 왔다. 그 가운데에서도 빠른 응답 성능과 높은 분해능을 지닌 압전 소자(piezoelectric actuator)와 탄성 변형을 통하여 부드럽고 연속적인 운동을 제 공할 수 있는 유연 힌지(flexure hinge)의 조합이 널리 사용되 고 있다 (2,3) .…”
Section: 서 론unclassified