A generalized multiport network analyzer implemented using commercially available hardware is presented. Measurement calibration is accomplished through a novel calibration procedure which requires only conventional standards used for two-port calibrations, The calibration theory accounts for the errors due to the signal switching network but does not systematically remove errors due to signal leakage between port pairs. The approach is verified on a three-port test set implementation, and the measuring system can be expanded to n-ports with additional hardware in a straightforward manner. Experimental verification was carried out through measurement of one, two, and three ports devices connected to the test set ports in several different ways. Excellent agreement of the same corrected S-parameters measured at different test set ports was observed, and confidence in system accuracy is established through measurement of two-port verification standards.
This paper describes a cost-effective DC and microwave test system for production screening of discrete and process-monitor GaAs FETs. Topics covered include system hardware, test software and data storage, DC error-correction, RF GaAs FET modeling, RF probe card technology, error-correction for common-mode inductance, and on-wafer calibration.Introduction. Test philosophy for GaAs FET qualification in a high-volume mode encounters two conflicting goals. First, the cost of test must be kept to a minimum. This mandates such actions as test time and test plan reduction and capital and expense minimization. Second, user insistence upon guaranteed DC and microwave performance for each chip implies expensive RF qualification and modeling.
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