In this study, we report a conceptually novel broadband high-frequency electron spin resonance (HFESR) spectroscopic technique. In contrast to the ordinary force-detected ESR technique, which detects the magnetization change due to the saturation effect, this method measures the magnetization change due to the change of the sample temperature at resonance. To demonstrate its principle, we developed a silicon nitride nanomembrane-based force-detected ESR spectrometer, which can be stably operated even at high magnetic fields. Test measurements were performed for samples with different spin relaxation times. We succeeded in obtaining a seamless ESR spectrum in magnetic fields of 15 T and frequencies of 636 GHz without significant spectral distortion. A high spin sensitivity of 10 12 spins/G·s was obtained, which was independent of the spin relaxation time. These results show that this technique can be used as a practical method in research fields where the HFESR technique is applicable.

We developed a practical useful method for force- and torque-detected electron spin resonance (FDESR/TDESR) spectroscopy in the millimeter wave frequency region. This method uses a commercially available membrane-type surface-stress (MSS) sensor. The MSS is composed of a silicon membrane supported by four beams in which piezoresistive paths are integrated for detecting the deformation of the membrane. Although this device has a lower spin sensitivity than a microcantilever, it offers several distinct advantages, including mechanical strength, ease of use, and versatility. These advantages make this device suitable for practical applications that require FDESR/TDESR.

We present a new method for torque magnetometry by using a commercially available membranetype surface-stress sensor (MSS). This sensor has a silicon membrane supported by four beams in which piezoresistive paths are integrated. Although originally developed as a gas sensor, it can be used for torque measurement by modifying its on-chip aluminum interconnections. We demonstrate the magnetic-torque measurement of submillimeter-sized crystals at a low temperature and in strong magnetic fields. This MSS can observe de-Haas-van-Alphen oscillation, which confirms that it can be an alternative tool for self-sensitive microcantilevers.

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