New Method for Torque Magnetometry Using a Commercially Available Membrane-Type Surface Stress Sensor

Abstract

We present a new method for torque magnetometry by using a commercially available membranetype surface-stress sensor (MSS). This sensor has a silicon membrane supported by four beams in which piezoresistive paths are integrated. Although originally developed as a gas sensor, it can be used for torque measurement by modifying its on-chip aluminum interconnections. We demonstrate the magnetic-torque measurement of submillimeter-sized crystals at a low temperature and in strong magnetic fields. This MSS can observe de-Haas-van-Alphen oscillation, which confirms that it can be an alternative tool for self-sensitive microcantilevers.

Force-detected high-frequency electron spin resonance spectroscopy using magnet-mounted nanomembrane: Robust detection of thermal magnetization modulation

“…Recently, membrane-type micromechanical devices have proved to be effective for magnetic and [24,25] mag- netic resonance measurements [26,27]. As these devices have excellent physical properties, it is expected that they can address the problems associated with microcantilevers [28].…”

Membrane-based torque magnetometer: Enhanced sensitivity by optical readout of the membrane displacement

“…Several detection schemes have been developed, e.g., capacitive, 7-10 optical, [11][12][13] or piezoresistive methods. [14][15][16] During the past years, torque sensors were miniaturized in micro/nano-lever systems pushing the sensitivity down to 10 14 Am 2 . However, the systems became extremely complex, and these ultra-precise methods impose severe restrictions on sample size and accessibility.…”