MOCVD TiSiN was evaluated as a barrier for Cu interconnects application. The TiSiN f i l m was formed by Si% soaking of MOCVD TiN. The TiSiN film showed improved wetting and adhesion to Cu as well as less stress hysteresis in its integration with Cu. The low stress hysteresis yields higher resistance to Cu void generation during hot storage testing. Electrical tests on DLM Cu test structures demonstrated comparable line and via chain resistance and equivalent line-to-line leakage current in BTS testing compared to conventional PVD Ta(N).
Optical Interleaving filters are attractive components in Wavelength Division Multi/Demultiplexing (WDM) systems especially narrower than 100GHz channel spacing system. Several types of interleaving filters have been proposed and realized. An interleaving filter is required to have the Box-like characteristics such as the periodic response, flat-passband, low insertion loss and low crosstalk. In addition, low chromatic dispersion (CD) is indispensable for Dense WDM (DWDM) systems. We focus on planar lightwave circuit (PLC) interleaving filters. In this paper, we present interleaving filters with a tandem configuration of Fourier transform-based Mach-Zehnder Interferometers (MZIs). The circuit using PLC technique is fabricated with high index contrast waveguides of ? 1.5%. We also have demonstrated integrated 1x4 (25-100GHz,50-200GHz) interleaving filters and arrayed waveguide gratings (AWGs) with 200GHz-channel spacing suitable for interleaving WDM system.
We developed the world's smallest 32-inch HDTV PDP. By improving the luminous efficiency, a luminance of 650 cd/m 2 and power consumption (discharge and driving circuit) of 200 W or less was achieved. Moreover, incorporating an Advanced Color Compensating (ACC) filter improved the PDP's color reproduction capability, better than that of CRTs.
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