A lack of high-mobility transistors has been one of the most crucial challenges facing the development of printable electronics. In this work, we report on the fabrication of high-mobility carbon nanotube thin-film transistors using a combination of transfer and high-speed flexographic printing techniques. Based on lithography-free nonvacuum processes, a high mobility of 157 cm2 V-1 s-1 with an ON/OFF ratio of 104 was achieved. Our ambient fabrication technique provides not only a promising platform for printed flexible devices but also demonstrates the realistic potential of low-cost manufacturing technology.
We fabricated sub-10-µm-class short-channel, top-gate carbon nanotube thin-film transistors using a flexographic printing technique, which is a high-speed printing technique that uses a flexible polymer plate. This device fabrication process is completely photolithography-free and vacuum-free as a result of the printing technique. The printing resolution was improved by using micro-flexo plates fabricated by a microprocessing technique. The fabricated device, with a channel length of 9.5 µm, exhibited a high on-current of 0.94 mA/mm. Hysteresis was suppressed by introducing a top-gate structure.
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