A silicon bulk micromachiend accelerometer structure has been fabricated and characterize4 that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear arid up to two axes of angular acceleration can be measured This combination has practical relevance for single-point sensing of the complete motion of e.g. a c a r body with a minimum number of sensors in applications like vehicle dynamic control or crash detection.
This paper presents the setup, operation principle, and fabrication process of a novel type of flow velocity sensor. Like the well known classical Prandtl tube, it realizes flow velocity detection by measurement of the pressure difference between stagnant fluid pressure in front of the sensor and static pressure in thle flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, that serves as the counter electrode of an integrated capacitor which is direcfly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed. Results of wind tunnel experiments confirm the sensor's operation principle. Finally, the sensor's merits and drawbacks are summarized.
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