The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement

Berberig, Oliver; Nottmeyer, Kay; Mizuno, J.; Kanai, Y; Kobayashi, Takashi

doi:10.1016/s0924-4247(97)01733-0

Cited by 35 publications

(22 citation statements)

References 1 publication

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Recently, the development of multi-sensor integrated technology is a trend in MEMS followed by Du et al, among others, who integrated a previously designed drag force sensor [68] with a thermal one to realize a micro-wind sensor. Also in this case, the sensor utilizes the thermal part for low wind velocity (<2 m·s by measurement of the pressure difference between the stagnant fluid pressure in front of the sensor and static pressure of fluid around the sensor [70]. The pressure gradient causes the deflection of a membrane that constitutes one of the two plates of a capacitor, and results in a decrease of capacitance between the electrodes converted in a voltage signal by an electrical circuit.…”

Section: Non-thermal Flow Sensorsmentioning

confidence: 99%

Micromachined Flow Sensors in Biomedical Applications

Silvestri

Schena

2012

Micromachines

View full text Add to dashboard Cite

Application fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very small flow, and small size). Moreover, the feedback provided by integrating microflow sensors to micro mass flow controllers is essential to deliver accurately set target small flows. This paper is a review of some application areas in the biomedical field of micromachined flow sensors, such as blood flow, respiratory monitoring, and drug delivery among others. Particular attention is dedicated to the description of the measurement principles utilized in early and current research. Finally, some observations about characteristics and issues of these devices are also reported.

show abstract

Section: Non-thermal Flow Sensorsmentioning

confidence: 99%

Micromachined Flow Sensors in Biomedical Applications

Silvestri

Schena

2012

Micromachines

View full text Add to dashboard Cite

show abstract

“…Modern pressure sensors that are used in this environment are silicon based capacitive sensor [2][3][4]. Silicon sensors can reach high sensitivity and accuracy, however they scarcely address all the requirements of the above industrial applications, such as high robustness and low manufacturing costs.…”

Section: Introductionmentioning

confidence: 99%

A non-invasive capacitive sensor strip for aerodynamic pressure measurement

Zagnoni

Golfarelli

Callegari

et al. 2005

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

This paper presents a capacitive pressure sensor strip implemented in general purpose printed circuit board (PCB) technology based on a thin 3D structure composed of polyimide, woven glass reinforced epoxy resin (FR4) and metal layers. Multiphysics finite elements method (FEM) simulations have been performed over the proposed structure in order to develop a time-dependent electrical and mechanical model that can be easily used to tailor the characteristics to the application. The device targets a wide class of fluid dynamics applications, being non-invasive, comformable and smart for placement. The device simulations are herein validated by experimental wind tunnel measurements and compared with figures obtained on a wing profile by conventional electromechanical pressure transducers. This approach is one of the first example of fully embedding and electronically controlled fluid flow monitoring apparatus that could be used in replacement of state of the art mechanical systems.

show abstract

“…A review of recent advances in micromachined liquid flow sensors can be found in [1,2]. The most widly used functional principles are differential pressure detection [3,4], thermal dilution in a flow stream [5][6][7] and time of flight (or thermal transit time) measurement of a heat impulse injected into the flow [5,8]. The time-of flight type thermal flow sensor is accurate and stable due to its sensing mechanism.…”

Section: Introductionmentioning

confidence: 99%

Flow-velocity Microsensors Based on Semiconductor Fieldeffect Structures

Poghossian

Yoshinobu

Schöning

2003

Sensors

View full text Add to dashboard Cite

Abstract:A time-of-flight-type flow-velocity sensor employing the in-situ electrochemically generation of ion-tracers is developed. The sensor consists of an ion generator and two downstream-placed pH-sensitive Ta 2 O 5 -gate ISFETs (ion-sensitive field-effect transistor) that detect generated H + -or OH --ions. The results of the developed flow-velocity sensor under different modes of ion generation are presented and discussed. By applying this ISFET-array, the time of flight, and consequently, the flow velocity can be accurately evaluated using the shift of the response curve of the respective ISFETs in the array along the time scale. A good linearity between the measured flow velocity with the ISFET-array and the delivered flow rate of the pump is observed. In addition, a possibility of flowvelocity measurements by means of a LAPS (light-addressable potentiometric sensor) is firstly demonstrated.

show abstract

The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement

Cited by 35 publications

References 1 publication

Micromachined Flow Sensors in Biomedical Applications

Micromachined Flow Sensors in Biomedical Applications

A non-invasive capacitive sensor strip for aerodynamic pressure measurement

Flow-velocity Microsensors Based on Semiconductor Fieldeffect Structures

Contact Info

Product

Resources

About