Photon emission induced by a scanning tunneling microscope is studied theoretically when a substrate is covered with a layer of finite thickness. We formulate the calculation method of the radiated power including the retardation effect. Calculation of a metal film on a dielectric substrate indicates that the optimal thickness for the effective photon emission exists for the silver film. The effect of a dielectric film on a metal substrate is also investigated and it is found that the radiated power from the STM is enhanced strongly by putting the dielectric layer on the substrate.
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