Purpose -The purpose of this paper is to develop the device made of low temperature co-fired ceramics (LTCC) and lead zirconate titanate (PZT) by co-firing both materials. In the paper, the technology and properties of a miniature uniaxial ceramic accelerometer are presented. Design/methodology/approach -Finite element method (FEM) is applied to predict properties of the sensor vs main dimensions of the sensor. The LTCC process is applied during manufacturing of the device. All the advantages of the technology are taken into account during designing three-dimensional structure of the sensor. The sensitivity and resonant frequency of the accelerometer are measured. Real material parameters of PZT are estimated according to measurement results and FEM simulations. Findings -The ceramic sensor integrated with SMD package with outer dimensions of 5 ϫ 5 ϫ 5 mm 3 is manufactured. The accelerometer exhibits sensitivity of 0.75 pC/g measured at 100 Hz. The resonant frequency is equal to about 2 kHz. Useful frequency range is limited by 3 dB sensitivity change at about 1 kHz. Research limitations/implications -Sensitivity of the device is limited by interaction between LTCC and PZT materials during co-firing process.The estimated d parameters are ten times worse comparing to bulk Pz27 material. Further research on materials compatibility should be carried out. Practical implications -The sensor can be easily integrated into various devices made of standard electronic printed circuit boards (PCBs). Applied method of direct integration of piezoelectric transducers with LTCC material enables manufacturing of complex ceramic systems with built-in accelerometer in the substrate. Originality/value -The accelerometer is a sensor and a package simultaneously. The miniature ceramic device is compatible with surface mounting technology; hence, it can be used directly on PCBs for vibration monitoring inside electronic devices and systems.
Recent progress in development of new functional materials that are flexible and can be processed at very low temperatures (below 100 °C) opens a new opportunity for applications, such as non-destructive evaluation (NDE), or structural health monitoring (SHM) by applying active materials directly on the structures made out of a variety of materials, e.g. metals (aluminium), plastics, and polymers, including CFRP (Carbon Fibre Reinforced Polymer). This paper presents sensor arrays based on a flexible piezoelectric material – PiezoPaintTM. The newly developed material exhibits relatively high sensitivity (d33 coefficient up to 45 pC/N), extremely low processing temperatures (< 120 °C), and high compliance in the cured state, enabling direct deposition of acoustic/vibration sensor arrays on structures to be monitored by means of screen- or pad- printing. The printed sensors have been applied for impact detection where four-element arrays and a fully integrated wiring system has been deposited directly on aluminium as well as CFRP plates. The presented results show very good performance in terms of sensitivity, flexibility of usage, and ultra-low weight, making PiezoPaintTM technology an attractive alternative for SHM particularly in aerospace applications.
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