YAG laser assisted etching techniques were developed and investigated for releasing silicon micro structures. HC1,SF6 etc., which produce volatile exhaust, were used as etching gas at atmospheric pressure. The YAG laser assisted etching w a s a p p l i e d t o f a b r i c a t e a n electrostatic m i c r o a c t u a t o r , a r e s o n a t i n g s e n s o r a n d a ccelerometers. This resistless dry etching can be applied to threedimensional structures.
We have described a new DNA sequencing platform based on the Sanger chemistry, in which the large-scale microfabricated channel plates and electrophoretic system result in higher-throughput DNA sequencing. Three hundred and eighty-four channels are arranged in a fan-like shape on a 25x47 cm glass plate, on which 384 oval sample holes are connected to each channel coupled to the opposite anode access holes. Two microfabricated plates are set on the sequencing apparatus, in which sequencing electrophoresis is conducted on one plate and the preparation process is on another plate. Each sample hole is loaded with 2.3 microL volume of sample and injected into separation channels electrokinetically. High-quality sequencing data were acquired using the pUC18 template, achieving an average read-length of 1001 bases with 99% accuracy and a throughput of 5 Mbases per day per instrument. To assess the performance in actual sequencing field, the bacterial artificial chromosome shotgun library of the Pseudorca crassidens genome was sequenced, using 1/80 of the quantity of Sanger reagent (0.1 microL). We believe that this is the first demonstration of the useful performance of DNA sequencing using monolithic microfabricated devices with walk-away operation.
We are motivated to deal with a biped robot by an existence of almighty powerful control mechanism of human. Although a visual information, in particular, plays important role in order to realize admirable intelligence in a humanoid robot, we must assert a vision to be one of the developing sensors. In fact, there are many difficulties of both aspects of restrictive hardware resources for a vision and real-time image processing for motor control.In this paper, we clarify a structure and a nature of a visual information processing system which should be equipped with a biped robot. For this purpose, a human eye structure and its movements, and brain motor control through a central nervous system are considered as an analogy with robotics. We shall show that a gaze control mechanism like human is absolutely indispensable for a vision system of a biped robot. Furthermore, we investigate considerable differences between the human eyes and the biped robot ones. This allows us to propose a new, simple and intuitively understandable criteria, called stably gazing scope, for evaluating gaze control performance in the sense of availability of visual information for robot motion control.
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