Articles you may be interested inGrowth and characterization of carbon nanotubes on constantan (Cu-Ni-Mn alloy) metallic substrates without adding additional catalystsThe single-walled carbon nanotubes ͑SWNTs͒ have been considered as an alternative material for nanoelectronics, such as field-effect transistor or nanosensor, due to their unique electronic properties. However, an in situ growth process that can synthesize SWNTs with good position, diameter, and directional control is not yet available. Recent developments on the synthesis of SWNTs by deposition of ultrathin catalyst metal on the support of high specific areas were quite encouraging. In this study, high-yield vertically aligned SWNT arrays are demonstrated by in situ growth process with/without dielectric support material. In the case with dielectric support material, the role of dielectric support layer and the mechanisms of SWNT growth control will be discussed. Then, in the case without dielectric support material, the iron-based catalytic system revealed the ability to grow SWNTs from single-crystal silicon wafer directly, giving rise to the possible application of device structure with specific process module, for example, vertically aligned carbon nanotube field-effect transistor device may need to grow SWNT from doped-silicon area ͑source or drain well͒. In these experiments, micro-Raman spectroscopy and high-resolution transmission electron microscopy were utilized to characterize the SWNT properties and structures.
Carbon nanotubes have been considered as an alternative material for next generation nanoelectronic devices, such as the carbon nanotube field-effect transistor (CNT-FET) or nanosensor. Large-scale growth of single-walled carbon nanotubes (SWNTs) is particularly essential to the fabrication of the CNT-FET on a full wafer. In this study, SWNTs grown at designated positions on broken pieces in a conventional thermal furnace chemical vapor deposition (CVD) system and on a 4-in. full size silicon wafer in a cold-wall thermal CVD were compared. The distinct characteristics of SWNTs grown by the two systems are explained by the differences in the temperature distribution and the gas flow pattern, and their interplay with the catalysis and the feedstock gas decomposition. The adoption of cold-wall CVD process provides a simple method, but an essential step, toward commercial applications of SWNT-based devices.
Here we present a method to synthesize single-walled carbon nanotubes (SWNTs) selectively suspended on tips of silicon-based nanostructure (Si-ns) templates. The Si-ns templates vertically aligned to the substrates are fabricated via an anisotropic etch process using reactive hydrogen plasmas, in which the etch-resistive nanomasks are the nanosized particles formed by thermal annealing of multi-layered catalytic thin films. After plasma etching, the nanosized self-masks remaining at the tips of the Si-ns directly serve as the catalysts for SWNT growth by thermal chemical vapour deposition. Consequently, the synthesized SWNTs are selectively suspended on the tips of the Si-ns, as revealed by characterizations using scanning electron microscopy and resonance Raman spectroscopy. This methodology provides a simple and straightforward approach to assemble two different nanomaterials, i.e., Si-ns and suspended SWNTs, together as a building block for constructing nanodevices for possible applications.
Articles you may be interested inSilicon photodiodes for low-voltage electron detection in scanning electron microscopy and electron beam lithography J.Shape dependent thermal effects in apertured fiber probes for scanning near-field optical microscopy J. Appl. Phys. 99, 084303 (2006); 10.1063/1.2188250High-speed and high-precision deflectors applied in electron beam lithography system based on scanning electron microscopy
In this paper, high quality single-walled carbon nanotubes (SWNTs) were synthesized by multilayered metal catalysts on silicon or silicon oxide substrate using thermal chemical vapor deposition method. The roles of multilayered metal catalyst were investigated by systematically varying the combinations of multilayered structure. Scanning electron microscopy, Atomic force microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy were used to examine the evolution of the morphology and the oxidation state of each constituent of the multilayered structure in the thermal processes and their roles in controlling the formation of SWNTs.
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