Abstract:Carbon nanotubes have been considered as an alternative material for next generation nanoelectronic devices, such as the carbon nanotube field-effect transistor (CNT-FET) or nanosensor. Large-scale growth of single-walled carbon nanotubes (SWNTs) is particularly essential to the fabrication of the CNT-FET on a full wafer. In this study, SWNTs grown at designated positions on broken pieces in a conventional thermal furnace chemical vapor deposition (CVD) system and on a 4-in. full size silicon wafer in a cold-w… Show more
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